Nano-device Fabrication-School of Microelectronics,Shandong University

Facilities

Nano-device Fabrication Location: Home >> Facilities >> Nano-device Fabrication

2020-08-031.Electron Beam lithograph (EBL)
2020-08-032.Laser Direct Writing System
2020-08-033.UV Exposure System
2020-08-03 4.ICP-RIE Dry Etching System
2020-08-035.Ultrasonic Aluminum Wire Bonder
2020-08-036.UV ozone
2020-08-037.Oxygen-plasma Cleaning Machine

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