Material Preparation-School of Microelectronics,Shandong University

Facilities

Material Preparation Location: Home >> Facilities >> Material Preparation

2020-08-031.Single target RF sputtering
2020-08-032.Electron beam evaporation coating instrument
2020-08-033.Thermal resistance evaporation coating instrument
2020-08-034.Atomic Layer Deposition System (ALD)
2020-08-035.Chemical vapor deposition (CVD)
2020-08-036.Metal-Organic Chemical Vapor deposition (MOCVD)
2020-08-037.Pulsed Layer Deposition (PLD)
2020-08-038.Metal organic evaporator
2020-08-039.Magnetron Sputtering

Total 9 pieces FirstPrevious1NextLast