1. Instrument name: Oxygen Plasma Cleaning Machine

Model: PDC-32G

Manufacturer: Harrick Plasma

2. The main function of the instrument

The dry plasma technology is used to remove the organic photoresist (ashing), and the natural oxide layer is removed by an integrated pretreatment step. The gas chemically reacts with the plasma to achieve the decontamination.

3. Main Specifications

RF Power: Low: 6.8W, Medium: 10.5W, High: 18W, using oxygen and nitrogen