中文
Nano-device Fabrication Location: Home >> Facilities >> Nano-device Fabrication >> Content

6.UV ozone

Date:2020-08-03Click:

1. Instrument name: UV ozone

Model: ProCleaner

Manufacturer: BioForce Nanoscience

2. The main function of the instrument

Remove molecular contamination from SPTs, AFM’s tips and surfaces;

Curing UV photoresist; UV photoetching of SAM surface; Oxidized PDMS

Surface disinfection

3. Main Specifications

Ozone from ultraviolet light