9.Magnetron Sputtering-School of Microelectronics,Shandong University

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9.Magnetron Sputtering

Date:2020-08-03Click:

1. Model and specification：MS350; Manufacturer：KYZK(Shenyang Keyou)

2. Main technical parameters

lVacuum degree: 1×10^-3Pa;Sample size：≤30 mm。

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