1. Instrument name: electron beam evaporation coating instrument

Models and specifications: Auto 500; Manufacturer: HHV

2. Main Specifications

Ultimate vacuum: 2×10-7 mbar;Background vacuum: less than 8×10-6 Torr;

Existing metal materials: Ti, Au, Ge, Ni, Pd, Pt.

1. Instrument name: electron beam evaporation coating machine

Model and specification: DN500

Manufacturer: Shenyang Scientific Instrument Research Co., Ltd.

2. Main technical indicators

The cold state ultimate vacuum of the chamber: 1×104 Pa

3. Sample size: diameter less than 10 cm.