1．Equipment name：MOCVD

Model and specification：ZDF-5227；Manufacturer：Sky Technology Development

2. Main technical parameters

lVacuum degree：2x10^-6Torr;

lMaximum temperature：1200^oC(reactor of III-Vgroup ), 800^oC (reactor of II-VI group ), 1000^oC(pretreatment chamber)

lSample size：30 mm,20 mm and 10 mm