中文

Research Achievements

Research Achievements Location: Home >> Research Achievements >> Content

Associate professor Feng Xianjin’s group has made progress in the study of high performance thin film transistors (TFTs) based on sputtered In-Al-Zn-O (IAZO) channel layer

Date:2020-08-03Click:

Recently, high performance thin film transistors (TFTs) based on sputtered In-Al-Zn-O (IAZO) channel layer were fabricatedby Professor Xianjin Feng’s group.IAZO is a potential and promising alternative for the extensively studied IGZO to be used in TFTs.The post-annealed IAZO film exhibited excellent properties including a low surface roughness, a very high Hall mobility of 74.2 cm2/Vs, a high average transmittance over 95% in the visible range, and a wide optical band gap of 4.1 eV. The TFT with Au electrodes exhibited a highμsatof 20.57 cm2/Vs and a highIon/Ioffratio of 4.02×107. Whereas the TFT with Ti electrodes showed a lowerμsatof 9.54 cm2/Vs, but a higherIon/Ioffratio of 7.39×107, as well as a lowerSSand a much lower hysteresis.This study has been published in the reputed journal of IEEE Electron Devices Letters and demonstrated the great potential of IAZO TFTs to be used in the next-generation electronics and optoelectronics.