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Professor Ma Jin's research group have made progress in the study of anatase titania single crystal film based thin film transistors

Date:2020-08-04Click:

Based on the heteroepitaxial growth of high quality anatase titania(a-TiO2)single crystal filmson MgAl6O10(100) substrates by metalorganic chemical vapor deposition (MOCVD),the research group of Professor Ma Jin from the School of Microelectronics successfully prepared single crystal TiO2-based thin film transistors(TFTs),which is of great significancefor the development ofsingle crystal a-TiO2film materials in device applications. Relevant research results have been published on IEEE TRANSACTIONS ON ELECTRON DEVICES, with the article title of “Fabrication and Characterization ofHigh-Performance Thin-Film TransistorsBased on Epitaxial Ta-Doped TiO2Films”.

Ph.D.Zhao Weifrom class 2016is the first author. Professor Ma Jin, researcher LvYuanjie and associate researcher Feng Xianjin are the corresponding authors.Shandong University ranked first among the completed units.Single crystal a-TiO2films have the advantages of high dielectric constant, few defects and high carrier mobility, which are more conducive to the fabrication of high-performance optoelectronic devices.Thepreparation of a-TiO2single crystal filmmay lay a foundation for the manufacture of a-TiO2basedhigh-performance TFTs, MOSFETsand ultraviolet detectors. This work manifest thatsingle crystal a-TiO2film is a promising active-channel material for MOxTFTs.